1. WAFER PLAN VIEW (300mm Top-View)
2. NOZZLE TRACE & FOOTPRINT
3. RADIAL FILM THICKNESS PROFILE
Cursor r: r: 75 mm | h: 182.6 µm
RADIAL CURSOR INSPECTOR (r = 75 mm) [Drag cursor on graph to inspect]
Radius 75 mm
Film Thickness 182.6 µm
Chemical Blend DIW 60 / IPA 40
Viscosity (μ) 1.15 cP
Surface Tension (σ) 58.2 mN/m
Flow Velocity (u) 84.5 mm/s
Reynolds No. (Re) 1.21 × 10⁶
Flow Regime Turbulent
Dewetting Status Stable
Marangoni Effect 0.042 mm/s
Center (0mm)
742.1 µm
25mm
512.4 µm
50mm
298.7 µm
75mm
182.6 µm
100mm
112.3 µm
125mm
61.8 µm
Edge (150mm)
24.7 µm
4. WAFER CROSS SECTION (Side View) Vertical thickness is visually amplified.
Max Thickness
742.1 µm
@ r (mm)
0.0
Edge Thickness
24.7 µm
Avg Thickness
184.3 µm
Re @ Edge
1.21 × 10⁶
Regime
Turbulent
💡 노즐 구조물을 좌우로 드래그하면 X 위치가 실시간 변경됩니다
MIXED PROPERTIES (Flow-Weighted)
ρmix: 0.91 g/cc
μmix: 1.47 cP
σmix: 55.3 mN/m
Local Equilibrium Properties
EDGE FORCE DOMINANCE
Centrifugal >> Viscous > Marangoni
Engineering Screening Indicator
EDGE EVAPORATION
LOW
Temp & RPM Screening Indicator
MARANGONI EFFECT
MEDIUM
uM Screening: 0.042 mm/s
MODEL CONFIDENCE
MEDIUM
Reduced-Order LUB-2D Model
🔬 SCIENTIFIC MODEL & ENGINEERING LIMITATIONS (CLICK TO TOGGLE)

⚠️ Model Scope & Limitations

• Reduced-Order Model: Uses 2D depth-integrated lubrication approximation (LUB-2D).
• Not 3D CFD / VOF: Does not resolve 3D navier-stokes or explicit phase-volume tracking.
• Representative Properties: Chemical physical constants are reference baseline values.
• Reaction Kinetics: Multi-chemical reaction enthalpy or complex phase changes are not explicitly modeled.
• Equipment Calibration: Actual chamber matching requires empirical process calibration constants.

① Continuous Spin Film Equation

h(r) = [ 3μQ / (2πρω²) ]1/3 · r-2/3

Balance between centrifugal force and viscous shear stress in steady-state spin coating (Emslie, Bonner, Peck 1958).

② Viscosity Temperature Dependency

μ(T) = μ25 · exp( -B · (T - 25) )

Andrade viscosity fitting model for thermal processing effects.

③ Marangoni Screening Velocity

uM ≈ (h / 2μ) · ∇σ

Effective surface tension gradient flow screening model.